袩褍斜谢懈泻邪褑懈懈 邪胁褌芯褉邪
Muratov, M.
袙褋械谐芯 锌褍斜谢懈泻邪褑懈泄
8
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1
2025 (4)
- DETERMINATION OF RESIST CONTRAST IN ELECTRON BEAM LITHOGRAPHY UNDER DEPTH-DEPENDENT NONUNIFORM ENERGY DEPOSITION
- Influence of Ion Core on Structural and Thermodynamic Properties of Dense Plasma
- Sensitivity and Contrast Characterization of PMMA 950K Resist Under 30 keV Focused Ga+ Ion Beam Exposure
- EFFECT OF IONIC CORE ON THE PROPERTIES OF NON-ISOTHERMAL PLASMAS